Sensor

ABSTRACT

Sensors are provided which enable detection with a high sensitivity in microchemistry and biochemical analysis by using devices integrated into a compact configuration and can be freely disposed on desired positions of a channel to perform detection. 
     A measuring apparatus for detecting information and outputting light according to the information, the apparatus comprising: an active layer for emitting light and a micro-optical cavity, wherein light emission is limited in the active layer due to the influence of the selection of a photoelectromagnetic field mode, the selection is made by the micro-optical cavity, the light emission and a degree of selection of a photoelectromagnetic field mode is changed according to an environmental condition of the micro-optical cavity, so that the light emission is changed and the environmental condition is measured according to a change in the light emission.

TECHNICAL FILED

The present invention relates to a sensor for reading a concentration ofa substance flowing into a channel of a micro analysis system (μ-TAS), amicro pressure distribution and temperature distribution, and biologicaland genetic information. Further, the present invention relates to adata transmitter which transmits and processes detected information withhigh efficiency.

BACKGROUND ART

In recent years techniques for performing analysis with smaller systemshave been developed in chemical and biochemical fields. A typicalexample is a μ-TAS system using a microchannel. Separation/mixing,reaction and so on have been performed with channels smaller thanconventional ones. Moreover, a detecting element called DNA chip forreading biological and genetic information has been developed with thedevelopment of biotechnology and bioindustry.

Further, as three-dimensional micromachining develops in recent years,attention has been given to systems in which a small channel, a liquiddevice such as a pump and valve, and a sensor are integrated on asubstrate made of a material selected from the group consisting of glassand silicon, and chemical analysis is performed on the substrate. Thesesystems are called a miniaturizing analysis system, a μ-TAS (Micro TotalAnalysis System) or Lab on a Chip. By reducing the size of a chemicalanalysis system, a reactive volume can be reduced and an amount of asample can be largely reduced. Besides, analysis time can be shortenedand the power consumption of the whole system can be reduced.Furthermore, a smaller system raises expectations for the lower costthereof. Since the μ-TAS can miniaturize the system, reduce the cost,and remarkably shorten analysis time, it is expected that μ-TAS will beapplied to a medical field including home care and bedside monitoringand a biotechnological field including DNA analysis and proteomeanalysis.

For example, a microreactor is disclosed in which a series ofbiochemical experiments can be performed by a combination of severalcells (Japanese Patent Application Laid-Open No. 10-337173). In theseries of experiments, after a solution is mixed and reaction isperformed, quantitative analysis is performed and then separation isperformed. FIG. 11 schematically shows the concept of a microreactor 11.The microreactor 11 has a separate reaction chamber which is coveredtightly with a flat plane on a silicon substrate. A reservoir cell 12, amixture cell 13, a reaction cell 14, a detection cell 15, and aseparation cell 16 are combined in the reactor. By forming a number ofreactors on the substrate, a number of biochemical reactions can beperformed in parallel. Not only simple analysis but also substancesynthesis such as protein synthesis can be performed on cells.

Such a μ-TAS system and a biochip finally require a detecting step afteroperations including reaction are performed. Detection with light hasbeen used as a method less affecting an analyte with higher accuracy dueto its non-contact property and nonresponsiveness. For example,measuring methods have been used which include a measuring method ofadding a fluorescence label to an analyte and emitting light from anexciting light source to detect fluorescence, a measuring method ofirradiating an analyte with light from a light source to measure theintensity of transmitted light, and a method of bringing a prism closeto an analyte, emitting light from a light source, and measuring loss oftotal reflected light.

However, the method using a fluorescence label raises a problem ofcongeniality between an analyte and a label, so that a desired label,that is a label with a high sensitivity may not be used. Further,excitation light and fluorescence have different wavelengths in thismethod. Although degradation is less caused by intensive excitationlight serving as noise components, efficiency of generating fluorescenceserving as signal components is hard to increase. Therefore, it isdifficult to increase an overall S/N ratio.

According to the method of measuring a transmittance and an absorbanceby using transmitted light, when an analyte has a low transmittance,that is when a measured substance which is included in a detected fluidhas a high concentration, a signal is reduced due to a small quantity oftransmitted light, resulting in a low S/N ratio. When the concentrationof a measured substance is reduced to improve the S/N ratio, theoriginal signal is reduced and thus the S/N ratio is degraded. Further,although measurements are less affected by light, light directly crossesa detected fluid. Thus, measurements are prone to being affected by heatgeneration or photoreaction, thereby limiting a quantity of usablelight.

According to the method of measuring a loss of total reflected light, itis possible to use a larger quantity of light as compared withtransmitted light. However, light having a change (loss) to be detectedand irradiated light are equal in wavelength, so that a detectorrequires quite a large dynamic range. Namely, it is not possible toprecisely measure a small loss caused by slight reaction or the like ina microchannel.

The present invention is devised to solve the above problem of theconventional technique and provides a sensor and a measuring apparatuswhereby in microchemistry and biochemical analysis of a μ-TAS system, abioanalysis chip, and so on using a microchannel, detection can beperformed with a high sensitivity by using devices integrated into acompact configuration, and detection can be freely performed on adesired position of a channel. Moreover, according to the presentinvention, microcavity laser is applied to provide a portable tester.

DISCLOSURE OF THE INVENTION

According to an aspect of the present invention, there is provided asensor for detecting information and outputting light according to theinformation, the sensor wherein it comprises a micro-optical cavity forchanging a degree of selection of a photoelectromagnetic field modeaccording to an environmental condition of the cavity; and an activelayer in which light emission is limited by influence of the selectionof a photoelectromagnetic field mode, wherein the light emission ischanged according to a change in the environmental condition.

According to another aspect of the present invention, there is provideda sensor array comprising the sensors of claim 1 arrangedjuxtapositionally in one- or two-dimensional array and outputting asignal of juxtapositional lights outputted from the sensors according toa plurality of environment information corresponding to positions of thesensors.

According to still another aspect of the present invention, there isprovided a method for acquiring sensor information, wherein the sensorarray of claim 16 is used and the signal of juxtapositional lights fromthe sensor array is detected by an area sensor.

According to a further aspect of the present invention, there isprovided a sensor using a microcavity laser, wherein one of twosupporting substances capable of making specific binding with asubstance to be detected is supported on a peripheral portion of themicro-optical cavity, and a specific binding state of the substance tobe detected with the supporting substance is detected based oninformation about laser oscillation state of detected laser. Further,the present invention relates to a sensor system, wherein the sensorsare juxtapositionally arranged on a common substrate and plural kinds ofsubstances to be detected are juxtapositionally detected by using aplurality of microcavity lasers juxtapositionally arranged.

According to a further aspect of the present invention, there isprovided a sensor comprising a micro-optical cavity of a microcavitylaser and a probe for generating mechanical deformation on themicro-optical cavity, wherein a state of the mechanical deformation isdetected by measuring a change in laser oscillation state, the changebeing caused by deformation of the micro-optical cavity through theprobe.

BRIEF DESCRIPTION OF THE DRAWINGS

FIGS. 1A and 1B are schematic sectional views each showing theconfiguration of a fluid component detector according to Example 1 whichuses a sensor of the present invention;

FIG. 2 is a schematic view showing the specific configuration of amicrocavity LD according to Example 1;

FIGS. 3A, 3B, 3C, 3D, 3E and 3F are schematic views each showing theconfiguration of a sensor device using a microcavity LD of Example 2;

FIGS. 4A and 4B are schematic views showing another configuration of thesensor device using the microcavity LD of Example 2;

FIGS. 5A, 5B, 5C and 5D are schematic views showing the configuration ofa sensor device using a microcavity LD of Example 3;

FIGS. 6A and 6B are schematic views showing the configuration of asensor device using a microcavity LD of Example 4;

FIGS. 7A, 7B and 7C are schematic views each showing the configurationof a sensor device using a microcavity LD of Example 5;

FIG. 8 is a schematic view showing the configuration of a sensor deviceusing a microcavity LD of Example 6;

FIG. 9 is a schematic view showing the configuration of a mounted sensordevice using a microcavity LD of Example 7;

FIG. 10 is a schematic view showing the steps of a sensor device usingthe microcavity LD of Example 7;

FIG. 11 is a conceptual view showing a conventional microreactor;

FIGS. 12A and 12B are schematic views showing the configuration of abiochemical sensor using a microcavity LD of Example 8;

FIG. 13 is a schematic view showing an example of another embodiment ofa biochemical sensor according to Example 8;

FIGS. 14A, 14B, 14C and 14D are schematic views showing anotherembodiment of the biochemical sensor according to Example 8;

FIGS. 15A, 15B and 15C are schematic views showing the configuration ofa biochemical sensor according to Example 9;

FIGS. 16A, 16B and 16C are schematic views showing an example of theconfiguration of a sensor using metal surface plasmon according toExample 10;

FIGS. 17A, 17B amnd 17C are schematic views showing an example ofanother configuration of a sensor using metal surface plasmon accordingto Example 10;

FIG. 18 is a schematic view showing an example of the configuration of atactile sensor according to Example 11; and

FIG. 19 is a schematic view showing an example of the configuration of abiochemical sensor using the tactile sensor according to Example 11.

BEST MODE FOR CARRYING OUT THE INVENTION

The following will describe a preferred embodiment of the presentinvention.

A sensor according to the present invention is preferably used to detectinformation other than light.

The sensor of the present invention is preferably disposed in a channelfor flowing a fluid or near the channel, and the environmental conditionis preferably changed according to a solution flowing in the channel ora dissolved substance or solvent of the solution. The channel ispreferably a microchannel having a dimension of 10 μm or more and asolution flowing in the channel preferably forms a laminar flow on apredetermined position. Further, the environmental condition is morepreferably selected from the group consisting of a change in refractiveindex, light absorption, light scattering, a temperature change, andslight deformation of the sensor. The change in refractive index maydepend upon a concentration of the solvent or a temperature of thesolution. The light adsorption may depend upon a concentration of thedissolved substance. The temperature change may be caused by heatgenerated by a chemical reaction of the solution and/or the dissolvedsubstance. The sensor may respond to vibration caused by expansion andshrinkage resulting from a collision of the dissolved substance or achemical reaction of a substance in the solution. The slight deformationof the sensor may appear due to a pressure change caused by expansionand shrinkage resulting from a change in a flow rate of the solution ora chemical reaction of a substance in the solution. Alternatively, theslight deformation of the sensor may appear due to a pressure changecaused by expansion and shrinkage resulting from a change in a flow rateof the solution or a chemical reaction of a substance in the solution.

A surrounding part of the micro-optical cavity in the sensor of thepresent invention may be modified by an antigen or an antibody.

The sensor of the present invention may further comprises a probe forgenerating mechanical deformation on the micro-optical cavity.

The sensor of the present invention may further comprises a metal thinfilm between the micro-optical cavity and a detected substance.

In the sensor of the present invention, a kind of a substance to bedetected may be detected according to a change in a laser oscillationmode of the microcavity a peripheral portion of which supports pluralkinds of the supporting substance, the supporting substancescorresponding to plural kinds of the substance to be detected. In thiscase, the probe may support one of two supporting substances capable ofmaking specific binding with the substance to be detected, andmodulation of mechanical deformation of the micro-optical cavity throughthe probe may be detected from a change in the laser oscillation state,which change is based on a mechanical resistance against ambient fluidand/or a change in weight of the probe by the specific binding.

In the present invention, light is outputted according to information.The information is preferably information other than light.

In a normal sensor, an electrical change, that is a change in current orvoltage is used as output. Although such an electrical output issecondarily converted into light to perform optical communication insome cases, the sensor of the present invention is characterized in thatthe primary output of the sensor is light.

In the present invention, an active layer for emitting light indicatesan active layer in a semiconductor light-emitting device such as asemiconductor laser. Positive electric charge and negative electriccharge (carrier) emits light and are recoupled with each other on adiode PN junction of the semiconductor light-emitting device. The regionis called an active region. The region is normally formed like a layerand thus the region is indicated as an active layer. Therefore, an“active layer” may indicate an active region in the presentspecification.

The micro-optical cavity of the present invention is represented as amicrocavity or a microcavity in the field of optical devices. Further, a“microdisk cavity” indicates a micro-disk cavity laser and a microspherecavity laser.

A photoelectromagnetic field mode is preferably a natural mode ofvibration in an electromagnetic field regarding light of an optical modeor an optoelectronic magnetic field mode.

Further, as to the natural mode of vibration, vibration includes twovariables for a space and time. Thus, two characteristics of a spacemode and a time mode are present. The time mode indicates selection of awavelength of light, and the space mode indicates the distribution oflight intensity (to be precise, complex amplitude has a phase) insideand outside the cavity. In the present invention, “confinement of light”preferably uses only a space mode in which a part with intensive lightis concentrated in a narrow region, in terms of the space mode.

In the present invention, a plurality of optoelectronic magnetic fieldmodes are present in a normal condition. When the microcavity is reducedin size, a single mode is present in principle and light is emitted onlyin a predetermined direction. In reality, coupling is slightly made to,for example, a mode emitting unnecessary light diverging widely around acavity. The degree of undesirable leaked light is normally defined by aQ-factor (Quality factor) which is a physically defined quantity. Thismeans that when a cavity of a value of a wavelength has Q of 1000, lightleaks to the outside and disappears after making 1000 reciprocations.When a leakage quantity is completely 0 and only a single mode isactually used, laser has a threshold current of 0A. Since the thresholdcurrent is nA and μA in reality, some leaked light is present.

In the present invention, the specific examples of the environmentalconditions of the microcavity include a refractive index of a substancemaking contact with the cavity, force (including a vibration andpressure) received from a substance making contact with the microcavity,and a temperature of a substance making contact with the microcavity.

In the present invention, the sensor preferably measures theenvironmental conditions as well as a change in light emission. Themeasurement of the environmental conditions is the object and themeasurement of light or injected current for pumping can be used as ameans.

For the sensor of the present invention, a microcavity LD is used. Themicrocavity LD has been already known. The present invention ischaracterized by using the microcavity LD to measure the environmentalconditions. For example, the microcavity LD does not operate well in theevent of a temperature change in some cases. The present invention ischaracterized by using such a phenomenon for a sensor such as ameasuring apparatus.

In the present invention, the sensor is disposed in a channel forflowing a solution or in the neighborhood of the channel. “Neighborhood”is defined as follows:

-   (1) In the case of a refractive index of a substance making contact    with the microcavity, the neighborhood indicates a range for sensing    a photoelectromagnetic field. The range of a wavelength order, that    is the upper limit is about 0.01 μm to about 10 μm in substance.-   (2) In the case of force received from a substance making contact    with the microcavity, the neighborhood indicates a conduction range    of vibration and pressure. This range is varied with configurations    and the upper limit is about 0.1 μm to about 10 mm.-   (3) In the case of a temperature of a substance making contact with    the microcavity, the neighborhood indicates a range of heat    conduction. This range is varied with heat conductivities and    thermal resistances and the upper limit is about 0.1 μm to about 10    mm.

Therefore, the neighborhood of 0 corresponds to the configuration ofExample 2 in which a hole is formed on a channel and a microcavity isused as a wall of a channel.

In the present invention, a fluid flows into a channel and the fluidspecifically includes a liquid and a gas. When a gas carries particles,a refractive index, a temperature, a concentration, and a vibrationchange as in the case of a liquid. Thus, the present invention isapplicable to a gas which serves as a fluid flowing in the channel andcarries particles.

As will be described below, with a microsensor using anultralow-threshold laser of the microcavity according to the presentinvention, in microchemistry and biochemical analysis of a μ-TAS system,a bioanalysis chip and so on using a microchannel, detection can beperformed with a high sensitivity by using devices integrated into acompact configuration, and a plurality of detectors can be freelydisposed on desired positions of the channel on a flat surface.Moreover, a signal corresponding to detected information is subjected toparallel light output with an array of devices, so that parallel outputcan be directly processed and transmission can be performed with asimple configuration. Moreover, a portable tester can be also formed byapplying the microcavity laser of the present invention.

EXAMPLES

Referring to examples, the present invention will be specificallydescribed below. Hereinafter, LD denotes a microcavity laser diode.

Example 1

In the present example, the sensor of the present invention is appliedto a fluid component detector. As shown in FIG. 1A, the fluid componentdetector includes three layers of an channel LD layer 101, a wiringlayer 102, and a light-receiving layer 103 and channels. FIG. 1B is aschematic plan sectional view showing the LD layer 101.

The channels represented as 104, 105, 106 and 107 and LDs represented as108, 109 and 110 are disposed in the same layer, that is the channel LDlayer 101. Carriers are supplied to the LDs by the wiring layer 102, andlight outputs 111 and 112 from the LDs are detected by thelight-receiving layer 103 on the opposite side. Namely, thelight-receiving layer 103 of the present example functions as an areasensor for detecting a light output signal from the sensor. In thepresent example, by using a CCD image sensor, the position of the LDemitting light is detected, the light quantity of the LD is detected foreach of the LDs as an image, and the image is processed.

The microcavity LD of the present example is 1 to 10 μm in size. A usedwavelength ranges from about 1.5 μm, which is near-infrared for opticalcommunication, to about 300 nm from which little light passes throughglass. For information, an ordinary surface-emitting laser is on theorder of size that exceeds the size of the microcavity LD.

In the present example, the size of the channel in cross section, thatis the width of the channel is about 10 μm. The width of the channel canbe selected from 1 to several hundreds μm in consideration of fluidcontrol techniques including the use of a laminar flow employed inso-called μ-TAS (Micro Total Analysis Systems) and so on.

FIG. 2 shows the microcavity LD used in the present example. FIG. 2schematically shows the appearance of a cylindrical microcavity LD. Themicrocavity LD is constituted of a micro-optical cavity, which includesmirrors 202 and 203 for first and second micro-optical cavities and acavity spacer 204 on the substrate 201, and an active layer 205. Themicro-optical cavity has a size permitting a small region for confininglight to have a size corresponding to the wavelength of the light.Reference numeral 206 denotes an emitted laser beam. An arrow 207denotes a direction of emission, that is a light-emitting direction.

In the cylindrical microcavity LD, light is confined by the multilayermirrors 202 and 203 in the light-emitting direction and total internalreflection caused by a difference in refractive index between a cylinderand the outside in the normal direction of the side of the cylinder, thenormal direction being perpendicular to the light-emitting direction.Such a cylindrical microcavity has a high Q-factor of 1000 or more thatindicates the quality of confinement.

The inside of the cavity spacer 204 includes the active layer 205 foremitting light. An example of an active substance and an activestructure of the active layer includes a high-efficiency opticalsemiconductor (direct-band gap semiconductor) of a quantum dot, aquantum well and so on. For example, the quantum dot is made of InAs andis formed by a method including a self-assembling method called SKgrowth method or a process including lattice distortion caused bylattice constant mismatch and a break and reconfiguration during crystalgrowth such as MBE.

Wiring is provided (not shown) to inject carriers of electrons and apositive holes into the active layer. The wiring is connected to a powersupply for supplying current. The active layer 205 physically reacts tothe current, operates as a laser due to the effect of the cavity, andoutputs the laser beam 206.

According to recent basic research, an active layer is confined in asemiconductor microcavity which has high quality, that is a highQ-factor and has a size corresponding to a wavelength, so that lightemission is limited and coupling is made highly efficiently to thesingle light mode of the cavity. As a result, a laser with an untralowthreshold value is achieved (Japanese Patent Application Laid-Open No.10-284806).

Such an ultralow-threshold laser is sometimes called a zero-thresholdlaser. In an ordinary laser, a light-emitting property of an LED whichis slow in response to low-current input is substantially absent. Evenin a low-current region, it is possible to effectively use a pluralityof characteristics of laser beam output, the characteristics including(1) response linearity of light output, (2) low noise and (3) highcoherence that are highly advantageous when light output is used totransmit information.

A typical threshold input current of such a zero-threshold laser rangesbetween nA order and μA order.

In the present example, the LDs disposed in the channel LD layer 101 arechanged in light emission responsively to conditions in the closechannels.

The present example detected a change in the degree of thephotoelectromagnetic field mode based on two environmental conditions of(1) a refractive index condition depending upon a concentration of adetected substance which is included in a fluid flowing into a channeland (2) a refractive index condition depending upon a temperature changecaused by heat of reaction of a reactant which is included in a fluidflowing into a channel. Namely, (1) in the case of a high concentrationor (2) in the case of a high temperature, the fluid is increased inrefractive index and is reduced in difference in refractive index from acylindrical cavity. Thus, the condition of confining light in thecylindrical cavity, that is the eigen mode of an electromagnetic wave ischanged, changing the light output of the LD.

When a refractive index is largely changed, a threshold value increasesto supplied current or more and light emission is stopped. Therefore,when the light-emitting states of the LDs are detected by thelight-receiving layer 103, it is possible to measure the conditions ofthe channels close to the LDs. By properly designing the channels andthe LDs regarding a substance to be applied, a place to be supplied withthe substance, a place should be detected, and so on, thereby achievingan apparatus which is highly functional as a comprehensive and paralleldetection system. Optically pumped lasers can be used as a LD.

Example 2

In contrast to Example 1, Example 2 of the present invention employsdifferent forms for LDs and channels. Referring to FIGS. 3A to 3F and 4Aand 4B, the present example will be described below. FIG. 3A shows theconfiguration used in Example 1. A cylindrical microcavity LD 302 isdisposed so as to make contact with a channel 301. Arrows in FIG. 3Bschematically show the eigen mode of light geometrically.

In the present example, a microdisk cavity LD 304 and a microdisk cavityLD 306 shown in FIGS. 3C, 3D, and 3E, and 3F are used instead of thecylindrical microcavity LD 302. In FIGS. 3A to 3F, reference numerals303 and 305 denote channels. Light in the microcavities LD of FIGS. 3Cand 3E have eigen modes which are geometrically shown in FIGS. 3D and3F. Light propagates along a peripheral optical path which is known as aso-called whispering gallery mode (WGM) and is confined into a smallregion corresponding to a wavelength by total internal reflection.

FIGS. 4A and 4B show embodiments in which contacts with channels arechanged for a cylindrical microcavity, a microdisk cavity, and amicrosphere cavity. FIG. 4A is a diagram schematically showing a LD 401making contact with channels 402 and 403 at the same time. FIG. 4B is aschematic view showing a configuration in which a hole is formed on achannel 405 and a part of a cavity LD 404 is used as the wall of thechannel. In FIG. 4A, it is possible to detect a sum of two or morechannels and an average condition, achieving more stable detection andso on. In FIG. 4B, the cavity is directly in contact with a fluid,achieving highly sensitive detection.

Example 3

In Example 3 of the present invention, a pressure of an analyte flowinginto a channel or a collision of a substance are detected. Referring toFIGS. 5A to 5D, Example 3 will be described below.

FIG. 5B is a schematic view showing that a microcavity LD 502 makescontact with a channel 501 as Example 1. FIG. 5A is a sectional view ofFIG. 5B. FIG. 5C is a sectional schematic view showing that a fluid inthe channel increases in pressure and thus a channel 503 is expanded anddeformed. A microcavity LD 504 making contact with the channel deformedthus is also deformed by force applied from the channel. The confinementof light in the microcavity, that is the space mode of anelectromagnetic wave highly depends upon a boundary condition. Thus,deformation on the cavity changes confinement of light. With the abovechange, the light emission of an LD is changed according to anoscillating condition of a laser. Hence, by detecting a change in lightemission, it is possible to detect a small change in the pressure of thechannel. FIG. 5D shows an example for measuring the quantity, speed,mass and so on of a detected substance particle 507 when the detectedsubstance particle 507 having a relatively large mass is mixed in afluid flowing into a channel 505. In this case, when the substancecollides with the wall of the channel 505, the wall of the channel isdeformed by reaction impulse resulting from a relatively large change inkinetic momentum. A microcavity LD 506 making contact with the channelis deformed according to the deformation and changes the light emissionof the LD as in the example of pressure detection shown in FIG. 5C.

Since an amount of deformation depends upon multiplying effect of acollision frequency, a colliding speed, and a mass of a collidedsubstance. Thus, by detecting the light emission of the LD, it ispossible to measure a quantity, a speed, and a mass of the detectedsubstance particle 507.

Example 4

Referring to FIGS. 6A and 6B, Example 4 of the present invention will bedescribed below.

FIG. 6A is a schematic view showing the configuration of a sensor devicein cross section. In the present example, the sensor device isconstituted of three layers of a channel layer 601, an LD wiring layer602 having microcavity LDs, and a light-receiving layer 603. Referencenumerals 611 and 612 denote light output.

As schematically shown in FIG. 6B, cylindrical microcavity LDs 608, 609and 610 are in contact with channels 604, 605 and 606 on theundersurfaces of cylinders. In FIG. 6B, reference numeral 613 denotes achannel and reference numeral 614 denotes a microcavity LD. Confinementof light in the axial direction of the cylinder is mainly caused byreflection of a multilayer film. In the present example, the number oflayers is reduced in the multilayer film so as to be affected by thechannels and a reflectivity is somewhat reduced, thereby optimizinginteraction with the channels. Further, in FIG. 6A, reference numeral607 denotes a channel and a microcavity LD does not make contact withthe channel in the cross section of the sectional view. FIG. 6A showsthat 608 and 610 of the plurality of disposed microcavity LDs emit lightaccording to the conditions of the channels with which the undersurfacesof the microcavity LDs are in contact and the microcavity LD 605 doesnot emit light. Light emission was detected by the area sensor of thelight-receiving layer 603. A CCD is used as the area sensor. Anothermost suitable sensor such as a CMOS image sensor may be used inconsideration of power consumption.

When the layer having the channels and the layer having the LDs areseparated from each other, while optimization of a multilayer mirrorbecomes somewhat complicated, the manufacturing process becomes moresimple due to the separated layers.

Example 5

Referring to FIGS. 7A, 7B and 7C, Example 5 of the present inventionwill be described below. In the present example, a so-called PhotonicBand Gap (PBG) structure is used as a microcavity LD. FIG. 7A is aschematic longitudinal section showing the configuration of the presentexample. An LD layer 702 including PBG cavities is disposed while makingcontact with a channel layer 701 including channels 704, 705 and 706.Further, a light-receiving layer 703 is disposed to receiving lightoutputs 710 and 711 from the LDs.

FIG. 7B is a schematic plan sectional view showing the channel layer701. FIG. 7C is a schematic plan sectional view showing the LD layer702. The PBG is constituted of cylindrical holes which are shadedportions arranged regularly in FIGS. 7A and 7C.

However, the regular arrangement of the holes includes microcavitiesrepresented as 707, 708 and 709, on which holes are not disposed. As aresult, periodicity locally disappears. It is known that the localdefects localize light and thus function as cavities. Since the size ofthe defect is determined by a wavelength, the defects caused by theabsence of a small number of holes in the PBG are operated asmicrocavity LDs by injecting therein an active substance for emittinglight. In this example, an active substance indicated by black trianglesis injected into the microcavities 707, 708 and 709 which are connectedto a power supply for carrier injection via wiring (not shown).

Light emission is changed by interaction with the channels on the sameprinciple as those of the other examples.

In the case of the PBG microcavity LD according to the present example,light is confined according to periodicity in the in-plane direction andlight is confined by total internal reflection caused by a difference inrefractive index in the thickness direction, that is in the direction ofthe normal to a surface where the cavity LD and the channel are incontact with each other. Thus, light emission is modulated by a changein refractive index which depends upon the temperature and concentrationof the channel, achieving detection.

The periodical length of the PBG, the size of the channel and so on arenot limited to FIGS. 7A, 7B and 7C. The periodical length and so on canbe adjusted properly in view of a design parameter such as a lightwavelength depending upon the used active substance.

Example 6

Referring to FIG. 8, Example 6 of the present invention will bedescribed below.

As with Example 7, the present example constitutes microcavity LDs 802,803 and 804 and the cross section is fundamentally similar to FIGS. 7A,7B and 7C of Example 7. However, as shown in FIG. 8 which is a plansectional view showing an LD layer 801, a local defect in PBG is formednot only on a cavity but also on a waveguide and light output isdeveloped in the in-plane direction and is detected through an end faceof the layer in the present example.

It is known that a periodic hole is made absent so as to connect thewaveguide like a straight line or a curve and thus light can bepropagated even when the size is equal to or smaller than a wavelength.Light having been guided by in-plane waveguides 805, 806 and 807configured thus and have reached the end face is inputted to a fiber viacoupling lenses 808, 809 and 810. Light inputted to the fiber isoptically connected to a predetermined position of a photo detector 811and is detected. Thus, it is possible to detect a PBG microcavity LDhaving emitted light and a quantity of the emitted light. Therefore, itis possible to detect various conditions of channels making contact withthe PBG microcavity LD.

The light-receiving element is disposed separately in this arrangement,which is an advantage to a configuration where two or more combinationsof channels and PBG layers are laminated and integrated or the channelsare caused to penetrate the PBG layer and are connected to each other.

Besides, a surface for taking out light output is not strictly limitedto an end surface. The arrangement can be freely changed as long as theobject of the present invention is achieved. For example, lighttemporarily travels in the in-plane direction from a cavity LD.Thereafter, light is reflected and propagated in the thickness directionwhile a reflection plane and so on is provided, and the light is takenout in the thickness direction.

Further, an active substance selected from the group consisting of Erand Tm is provided not only on the cavity but also a waveguide toperform light amplification, so that light output is amplified and thusan SNR is improved. Such a change is also effective in the presentinvention.

Example 7

Referring to FIGS. 9 and 10, Example 7 of the present invention will bedescribed below.

FIG. 9 shows a detector including the configuration of microcavity LDsand channels according to the present invention. FIG. 9 is a schematicview showing that the detector is formed like a watch and is attachableonto a human arm.

The detector is attached onto the arm by a belt 902. Necessaryinformation is detected by a sensor 901 from illustrated steps includingblood sampling. A detection result is displayed on a display 903.

FIG. 10 shows a flow only including representative steps for detectingnecessary information. The series of steps is constituted of a bloodsampling step 1001 for sampling a small amount of blood from a humanbody by using a collecting needle (not shown), a componentseparation/reaction step 1002 for separating a target component from thecomponents of blood and causing a reaction required for separation, acomponent concentration/reaction step 1003 for increasing a detectionsensitivity, a detection step 1004 for bringing a fluid, which containsa detected substance having been concentrated, into contact with themicrocavity LD of the present invention so as to perform high-sensitivedetection and converting a detection result directly into a desireddetection result by calculation, and a result display step 1005 fortransmitting the result to the display 903 to provide a display of theresult.

As shown in FIGS. 9 and 10, a portable detector and tester can be formedby using the microcavity LDs and channels of the present invention.Needless to say, the attaching type device of the present example mayproperly comprise a communicating function to a server or the like, aclock, and a photographing function of a portable terminal.

The present invention is not limited to the above-described examples anda sequence and so on may be changed without departing from the spirit ofthe present invention.

Example 8

The present example will describe one form where the sensor of thepresent invention is applied as a biochemical sensor using specificbinding such as an antigen-antibody reaction. The following explanationwill be made in accordance with FIGS. 12A, 12B and 13.

FIG. 12A shows a cylindrical microcavity laser 1101. The laser isconstituted of a multilayer mirrors 1102 and 1103, a cavity spacer 1104,and a laser medium 1105. Surface modification is performed on the outersurface of the multilayer mirror 1103 to fix ligands 1106, so that abiochemical sensor is formed.

An analyte 1107 serving as a detected substance is contained in, forexample, a fluid and is carried close to the sensor of the presentexample, and the analyte 1107 is specifically bound to the ligands 1106.The binding changes the characteristics of the multilayer mirror 1103.Such a change includes some phenomena such as a change in thepermittivity and refractive index of a multilayer film substance due toa change in an electronic state on a surface of a multilayer film, and achange in the optical thickness of the multilayer film due to theadhesion of a substance simply having a different refractive index fromthat of an atmosphere. However, a change in the optical characteristicsof the multilayer mirror is the essence of the present example. Such achange varies the light-confining state of the microcavity and thus thecharacteristics of the microcavity laser are changed. Namely, statessuch as a threshold value and the oscillation mode of laser oscillationare changed.

In this way, the oscillation state of the laser is changed by specificbinding. Thus, by setting laser oscillation at around the thresholdvalue, coupling does not occur as shown in FIG. 12A.

In the initial state, laser oscillation occurs and laser output light1108 is emitted to the outside. As show in FIG. 12B, in a state aftercoupling, a laser threshold value is increased by a change in the lightconfinement of the microcavity LD and laser oscillation does not occur,so that laser output light is not emitted. In this way, laser outputlight is varied according to the presence or absence of coupling of theanalyte, which serves as a detected substance, to the ligands. Thus, itis possible to detect the presence of the analyte and a coupling state.

Additionally, the initial state indicates the state of the microcavitylaser after the modification of the ligands. A setting is made whichincludes a change in the modification of ligands.

Moreover, in the present example, laser oscillation occurs in theinitial state. This process may be reversed. Namely, the followingsetting is also applicable: laser oscillation does not occur in theinitial state but laser oscillation occurs after the analyte is coupled.It is needless to say that selection can be performed according to thedesign of a sensor system.

Meanwhile, in order to increase a detection sensitivity, the followingchange is also applicable: an analyte is properly labeled with a metaland a permittivity is largely changed when coupling is made withligands. Such a change can be properly selected according to the use andspecification of the sensor system.

Further, as shown in FIG. 13, a plurality of laser sensors havingligands modified according to the present example may be arranged on asubstrate. Reference numerals 1201 and 1202 denote the modified portionsof ligands of a first kind and a second kind. In the case where thearrangement is constituted of sensors having two or more kinds ofmodified legands, when a fluid 1203 containing two or more kinds ofmixed analytes is carried close to the sensors, each of the analytes isspecifically bound to the sensor having the corresponding ligand. Asindicated by 1204 and 1205 of FIG. 13 in a simulated manner, laseroutput light from the sensor is varied with the kinds of ananalyte-ligand pair. Therefore, the sensor position is kept track foreach kind of ligands and the position of different laser output isdetected by using, for example, a sensor of an area type, so that two ormore kinds of analytes can be readily detected in a collective manner.

As shown in FIGS. 12A, 12B and 13, the microcavity LD of Example 8 iscylindrical. It is needless to that the microsphere cavity (FIG. 14A),the microdisk cavity (FIGS. 14B and 14D), a photonic crystal pointdefect cavity (FIG. 14C) and so on can be used properly.

Additionally, in the sensor of the present example, two or more kinds ofligands can be modified on a single microcavity. The effect will bediscussed below.

A laser normally has a plurality of laser oscillation modes whereoscillation may occur, and the microcavity LD also has such a pluralityof laser oscillation modes. Particularly in the case of highly symmetricspheres and disks or photonic crystals, a plurality of degenerate modesare available. As shown in FIG. 15, when a plurality of ligandmodifications are performed in the plurality of laser oscillation modesso that symmetry is lost and degeneracy is lifted for each kind ofligands. Thus, laser oscillation has different modes due to thespecifically bound analyte. For example, a hexagonal ligand modification1401 and a square ligand modification 1402 are provided in FIG. 15B. InFIG. 15C, around a photonic crystal point detect 1405 of a cylindricalhole called a triangle lattice structure, four cylindrical holes 1403and two cylindrical holes 1404 are disposed. A first ligand modificationis performed on the inner wall of the cylindrical hole 1403 and a secondligand modification is performed on the inner wall of the cylindricalhole 1404. The sensor composed of the microcavity LD configured thus hasa different laser oscillation mode according to the kind of thespecifically bound analyte. Therefore, a Q-factor (Quality Factor)corresponds to an oscillation mode, that is a threshold value is variedwith different states of light confinement, so that a change in laseroscillation output is detected. Alternatively, the emitting state ofoscillated laser output light, that is the orientation and intensitydistribution of laser output light are detected by an area sensor, adivided detector and so on, thereby detecting a plurality of analytes.

Example 9

Example 9 shows an example indicating a configuration for locallyincreasing the sensitivity of a sensor according to the presentinvention.

Referring to FIGS. 16A and 16B, the principle of the present examplewill be described below.

In FIG. 16A, a dielectric 1501 corresponds to the inside of amicrocavity, and light 1502 confined inside travels to an interface.High-efficiency confinement of light in a micro-optical cavity dependsupon total internal reflection of an interface between a substance of ahigh refractive index and a substance of a low refractive index expectfor a part using a periodic structure of a multilayer film or a photoniccrystal. FIG. 16A shows that the light 1502 is totally reflected on theinterface. Reflected light 1503 with a reflectivity of 100% istheoretically obtained. In this case, as has been widely known, adisplacement 1504 called Goos-Hänchen shift occurs as ageometrical-optical path on a reflecting position. The size of the shift1504 is an order of a used light wavelength. Hence, it is understoodthat a measurement range is almost a used light wavelength when theenvironments of the microcavity LD are measured by the microcavity LD ofthe present invention. Further, it is understood that an interactionlength is also an order of a light wavelength when light interacts witha detected substance.

The present example shows an example of a configuration for performingdetection with higher sensitivity. As shown in FIG. 16B, theconfiguration is characterized in that a metal thin film is disposed onan interface where a microcavity is adjacent to a detected substance. InFIG. 16B, a metal thin film 1506 is formed on an interface between adielectric 1505 and the outside and thus total internal reflection ischanged into a phenomenon for moving electrons in metal. The motion ofelectrons in metal is called surface plasmon particularly when a thinfilm or the like has an enhanced surface/interface effect. Then, lightcan propagate over a distance longer than a light wavelength around theinterface of a metal thin film dielectric while light and metal surfaceplasmon interact with each other. Propagated light with the motion ofelectrons is called metal surface plasmon polariton. The present exampleuses a propagation distance of the polariton that is longer than a lightwavelength. Namely, by using the propagation distance of polariton 1507that is an effective interaction length with a detected substance, thesensitivity of the microcavity laser sensor of the present invention isincreased.

As shown in FIG. 16C, an actual structural example indicates thatcorridor mode light 1509 of a microsphere cavity laser 1508 ispropagated around a surface longer than ordinary total internalreflection by a metal thin film 1510 formed around a detected substance1511, thereby increasing detection sensitivity.

Further, detection sensitivity can be locally increased by making thesame change also in microcavity laser sensors having shapes other thanthe microsphere cavity. For example, as shown in FIGS. 17A and 17B,various arrangements can be properly made which include a metal thinfilm 1601 provided on the side of a cylindrical microcavity (FIG. 17A)and a metal thin film 1603 provided on the undersurface of a cylindricalmicrocavity (FIG. 17B). Besides, in FIGS. 17A, 17B and 17C, referencenumerals 1602 and 1604 denote detected substances, reference numeral1605 denotes photonic crystal substrates, reference numeral 1606 denotesperiodic cylindrical holes, reference numeral 1607 denotes a lasermedium, and reference numeral 1609 denotes a channel and a detectedfluid.

Further, the metal thin film can have a concentric structure on theundersurface of a cylinder and thus light can be concentrated more atthe center of the undersurface to increase a local detection sensitivityaround the center.

Moreover, as shown in FIG. 17C, a point defect cavity of a photoniccrystal can be also increased in detection sensitivity by making thesame change. Particularly in the case of sensing on the micro-channelsystem according to Example 5 of the present invention, it is highlyeffective to locally increase a detection sensitivity around thechannel. Thus, a channel cover 1608 and a metal thin film 1610 of FIG.17C form a channel and the metal thin film. Combined with an increasedinteraction length of metal surface plasmon polariton, detection can beperformed with higher sensitivity by causing the metal thin film toserve as a channel wall directly making contact with a fluid.

Example 10

The present example indicates an example of the configuration in whichthe microcavity laser sensor of the present invention is applied to, forexample, a mechanical sensor such as a tactile sensor for detecting asmall mechanical change. In FIG. 18, eight cylindrical microcavitylasers 1701 are formed on a common substrate. The present example ischaracterized by tactile probes 1702, which are structures mechanicallyconnected to the top surfaces of cylindrical microcavities. Whenmechanical force 1703 is applied to the tactile probe 1702, the probe1702 is deformed and the cavity of the microcavity laser 1701 isdeformed together with the probe. The light confinement of themicrocavity depends upon its shape. Particularly in the case of a cavityused in the present invention with a high Q-factor, even a small changevaries confinement of light and a mode of light. Therefore, as shown inFIG. 18, when force is applied to the three probes on the left end,deformation stops laser oscillation, laser oscillation output light isemitted, and only the other microcavity lasers can have laseroscillation output light 1704.

In this way, for example, a pressure distribution is detected as withtactile sense of a hair on a human skin and output light is detected byusing an area sensor or the like, so that the pressure distribution canbe obtained as an image in a collective manner. Moreover, since theconfiguration of the present example employs the presence or absence oflaser oscillation and light output, the system has quite a high responsespeed and can be operated at, for example, MHz order or higher. Thus, apressure distribution can be readily detected as a moving image inso-called real time and the system can be applied to a feedback systemfor humans.

In addition, it is needless to say that the sensor of the presentexample can be used for something other than a human body. For example,as shown in FIG. 19, ligands are modified on the tips of the probes. Byusing a change in mechanical response including a resonance frequency ofthe probe, the change being caused by the coupling of an analyteaccording to a weight of the analyte or a frictional resistance againstambient atmosphere, excitation modulation is performed by using apiezoelectric element actuator 1803 and a driving AC power supply 1804,a change in the output light 1805 is detected, and synchronous detectionis performed as necessary, so that a substance can be detected with highsensitivity. In FIG. 19, reference numeral 1801 and a spare 1802 aretactile probes whose tips are modified with ligands of a first type anda second type. By using a specific binding of the ligand and theanalyte, two or more kinds of substances are detected, the detectionresults are detected in parallel by an area sensor, and an image can bereadily acquired from the results.

Additionally, the present example described ligand modification andspecific binding. It is needless to say that detection can be performedby a more simple method which includes ordinary physical adsorption anda method using friction between a substance and a probe and a differencein viscosity between substances.

1. A sensor for detecting information and outputting light according tothe information, the sensor comprising: a micro-optical cavity of amicro-activity laser configured to change a degree of selection of aphotoelectromagnetic field mode according to an environmental conditionof the micro-optical cavity; and an active layer integral to themicro-optical cavity of the micro-cavity laser from which light emissionis limited by influence of selection of a photoelectromagnetic fieldmode of the micro-optical cavity, wherein the light emission is changedaccording to a change in the environmental condition and the informationis detected by the change in light emission.
 2. The sensor according toclaim 1, wherein the sensor is disposed in a channel for flowing a fluidor near the channel.
 3. The sensor according to claim 2, whereinenviromental condition is changed according to a solution flowing in thechannel or a dissolved substance or solvent of the solution.
 4. Thesensor according to claim 3, wherein the channel is a microchannelhaving a dimension of 10 μm or more and a solution flowing in thechannel forms a laminar flow on a predetermined position.
 5. The sensoraccording to claim 3, wherein the enviromental condition is selectedfrom the group consisting of a change in refractive index, lightabsorption, light scattering, a temperature change, and slightdeformation of the micro-optical cavity of the sensor.
 6. The sensoraccording to claim 5, wherein the change in refractive index dependsupon a concentration of the solvent.
 7. The sensor according to claim 5,wherein the change in refractive index depends upon a temperature of thesolution.
 8. The sensor according to claim 5, wherein the lightadsorption depends upon a concentration of the dissolved substance. 9.The sensor according to claim 5, wherein the light scattering dependsupon a concentration of the dissolved substance.
 10. The sensoraccording to claim 5, wherein the temperature change is caused by heatgenerated by a chemical reaction of the solution and/or the dissolvedsubstance.
 11. The sensor according to claim 5, wherein the slightdeformation of the sensors appears due to vibration caused by expansionand shrinkage resulting from a collision of the dissolved substance or achemical reaction of a substance in the solution.
 12. The sensoraccording to claim 5, wherein the slight deformation of the sensorappears due to a pressure change by expansion and shrinkage resultingfrom a change in a flow rate of the solution or a chemical reaction of asubstance in the solution.
 13. The sensor according to claim 1, whereina surrounding part of the micro-optional cavity in the sensor ismodified by an antigen or an antibody.
 14. The sensor according to claim1, further comprising a probe for generating mechanical deformation onthe micro-optional cavity.
 15. The sensor according to claim 1, furthercomprising a metal thin film between the micro-optical cavity and adetected substance.
 16. A sensor array comprising a plurality ofsensors, each according to claim 1 and collectively arrangedjuxtapositionally in a one- or two- dimensional array and outputtingsignals of juxtapositional light outputs from the sensors according toparticular environmental information corresponding to the positions ofeach sensor.
 17. A sensor using a microcavity laser having amicro-optical cavity and an active layer integral to the micro-opticalcavity, wherein one of two supportingt substances capable of makingspecific binding with a substance to be detected is supported on aperipheral portion of the micro-optical cavity, and a specific bindingstate of the substance to be detected with the supporting substance isdetected based on a laser oscillation state of detected laser light. 18.A sensor system, wherein the sensors of claim 17 are juxtapositionallyarranged on a common substrate and plural kinds of substances to bedetected are juxtapositionally detected by using a plurality ofmicrocavity lasers juxtapositionally arranged.
 19. The sensor accordingto claim 17, wherein a kind of a substance to be detected is detectedaccording to a change in a laser oscillation mode of the microcavity, aperipheral portion of which supports plural kinds of the supportingsubstance, the supporting substances corresponding to plural kinds ofthe substance to be detected.
 20. A sensor comprising a micro-opticalcavity of a microcavity laser and a probe for generating mechanicaldeformation of the micro-optical cavity, wherein a state of themechanical deformation is detected by measuring a change in laseroscillation state, the change being caused by deformation of themicro-optical cavity by the probe.
 21. The sensor according to claim 20,wherein the probe supports one two supportig substances capable ofmaking specific binding with the substance to be detected, andmodulation of mechanical deformation of the micro-optical cavity throughthe probe is detected from a change in the laser oscillation state,which change is based on a resistance against ambient fluid and/or achange in weight of the probe by the specific binding.